產品介紹

HF回收系統((HF-RS) HF Recycle System)

On-site 藥液調和系統 ((OMS) On-site Mixing System)

Photo Resist 集中供給系統((PRDS) Photo Resist Distribution System)

Slurry供給系統((SDS)Slurry Distribution System)

有機溶劑脫水回收系統((OSDS) Organic Solvent Dehydration System)

藥液供給系統((CDS) Chemical Distribution System )

顯影液回收系統((DRS) Developer Recycle System)

顯影液稀釋系統((DDS) Developer Dilution System)