顯影液回收系統((DRS) Developer Recycle System)

設備概要
大型液晶面板製造工程用顯影液再生系統
TMAH濃度, 阻光液濃度, 碳酸鹽濃度的管理及安定CD值
高再生率可大幅削減成本

保證精度
TMAH濃度: 2.380±0.005wt%

Features
• Control of the true developer concentration that does not include carbonate and photo-resist, carbonate concentration in Developer
• Real-time monitoring of Developer components by multi-components concentration meter
• Reducing total volume of Developer waste
• Reducing consumption of TMAH and De-Ionized Water for TMAH dilution

三菱化學工程-顯影液回收系統