Photo Resist 集中供給系統((PRDS) Photo Resist Distribution System)

設備概要
大型液晶面板製造工程用阻光劑集中供給系統
使用200L 大型容器供給,大幅降低成本
全面使用單獨脫泡技術,取代殘餘物資

保證精度
0.5um以上的Particle ≦ 20 pcs/ml

Features
• Photo resist purchase cost and reduction of container replacement frequency are possible with large-sized Container
• Central supply from 200L polyethylene drum is possible
• Supply of photo resist is possible without including bubble

三菱化學工程-Photo Resist集中供給系統