顯影液稀釋系統((DDS) Developer Dilution System)

設備概要
漸近法顯影液稀釋系統
按照25wt% TMAH漸近法稀釋使用Process滴定裝置來確認2,380 wt% TMAH製造濃度

保證精度
2.380±0.002wt%

納入實績
17社 25套系統

Features
• Delivery experience for 300mm 65nm process
• High reliability by Potentiometric titration method
• Reduction of mixing-time by jet agitation
• Dilution performance within ± 0.002% of conc. (Actual results± 0.001wt%)

三菱化學工程-顯影液稀釋系統