On-site 藥液調和系統 ((OMS) On-site Mixing System)

設備概要
兩種或三種混酸的調和系統
粉末或高濃度原液的稀釋調和系統
高精度線上濃度測定裝置

保證精度

納入實績
Al 蝕刻液:H3PO4 + HNO3 + CH3COOH
Si 蝕刻液:HNO3 + HF + HNO3 + HF + CH3COOH
ITO蝕刻液:(COOH)2 從粉末
顯影液(彩色濾光片):Na2CO3 從粉末
剝離液(彩色濾光片):KOH

Features
• Mixed acid proportion system of two kinds or three kinds is possible
• Dilution proportion system from powder is possible
• System has highly precise in-line densitometry unit
• Example
Al – Etchant:H3PO4 + HNO3 + CH3COOH
Si – Etchant:HNO3 + HF + HNO3 + HF + CH3COOH
ITO- Etchant:(COOH)2 from Powder
Developer(Color Filter) Na2CO3 from Powder
Stripper(Color Filter) KOH

三菱化學工程-On-site藥液調和系統