Slurry供給系統((SDS)Slurry Distribution System)

設備概要
- ILD�STI�W�Cu Process用CMP Slurry稀釋供給系統
(Silica, Ceria, Aluminum Slurry的on site patch稀釋設備
稀釋精度,目標比重±0.005

- POU直前混合系統
Ceria Slurry和粉散劑的線上調和
流量精度 FS±1%

- H2O2濃度管理系統
W Slurry , Cu Slurry等的酸化劑調和系統
濃度精度,目標濃度±0.1wt%

Features
• Correspondence to the various Slurry which diversify (Silica, Ceria, Aluminum base, etc)
• A lot of application experience to 300mm 65nm process
• Stabilization of Polishing process by periodical cleaning by an automatic cleaning system
• Adoption of materials and parts in consideration of Slurry properties of matter (tank, Pump, Valve, etc)
• Various patent technology for Slurry system (a mixture for mixing, concentration management, particle monitor, etc)

三菱化學工程-Slurry 供給系統