菱洋國際工程股份有限公司


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藥液供給設備

ÃÄ²G¨Ñµ¹¨t²Î((CDS) Chemical Distribution System )

Slurry¨Ñµ¹¨t²Î((SDS)Slurry Distribution System)

Åã¼v²Gµ}ÄÀ¨t²Î((DDS) Developer Dilution System)

On-site ÃÄ²G½Õ©M¨t²Î ((OMS) On-site Mixing System)

Photo Resist ¶°¤¤¨Ñµ¹¨t²Î((PRDS) Photo Resist Distribution System)

回收、循環設備

¦³¾÷·»¾¯²æ¤ô¦^¦¬¨t²Î((OSDS) Organic Solvent Dehydration System)

Åã¼v²G¦^¦¬¨t²Î((DRS) Developer Recycle System)

HF¦^¦¬¨t²Î((HF-RS) HF Recycle System)